Varian Ion Implant Introduction
The Varian implant systems are proven platforms with a wide range of processes utilized by a large global install base. More than a production tool, the Varian systems will be an implant contributor to your production line for years to come.
Benefits:
Production-proven solution
Industry lowest CoO
High Throughput
OEM Group offers the following services:
Single-wafer processing
Tool Sales
Upgrades
Parts Supply: Consumable & Non Consumable
Repair Service: Remedial & Contract Support
Exchange & Refurbishments: Disks, Power Supplies
Tool Moves & Installations
Refurbishments: In-situ Overhauls
Engineering & Technical Support
Accel Columns
OEM Group owns all IP and product stewardship for these Varian Products:
Mid Current: A200, DF/CF Series, 350D, 350 DE, 300 XP
High Current: 80-10, 120-10, 160-10, 200-10, 80XP, 120XP, 160XP
High Frequency: 400/500 XP, G1500, G1510
Applications:
Power Device
Memory
Logic
Analog
Discrete
MEMS
Wafer Sizes: 100mm, 125mm, and 150mm
Medium Current: 350D
Dopant Species: B+, As+, P+
Energy: 35 – 200 keV
Variable Extraction: 10 – 35 keV
Beam Current Max: 1.5mA As+, P+; 0.6mA B+
Dose Range: 1E11 to 1E15 at/cm2
Dose Uniformity: 1σ< 0.75%
Dose Repeatability: 1σ< 0.75%
